Gas Cabinets (GC) & Gas Racks (GR)
High-purity, flammable, toxic and corrosive gas delivery.
Pillar 06 · Platform
Gas & Chemical Delivery Systems
Engineered ultra-high-purity gas and wet-chemical delivery equipment, exhaust abatement, hook-up and lifecycle services for semiconductor fabs — built in graded cleanrooms with a SEMI S2-compliant technology partner.
ISO Class 5Cleanroom grade for UHP welding & panel assembly
ASME B31.3GC2-qualified pressure piping compliance
300 mmMemory-fab gas delivery deployment record
Ultra-High-Purity Gas & Chemical Delivery
Engineered equipment, hook-up and lifecycle services for semiconductor fabs. Gas detection, remote SCADA visibility and hierarchical multi-level pressure control span the entire chain from bulk source to process tool.
System Architecture
Bulk Gas /
Chemical Station
Chemical Station
Purifier
Gas Cabinet /
Rack
Rack
Valve
Manifold Box
Manifold Box
Process Tool
Gas Delivery Equipment
Bulk Specialty Gas Supply (BSGS)
Single source feeding multiple outlets under hierarchical pressure control.
Valve Manifold Boxes / Panels (VMB/VMP)
Two to eight process connections with independent branch control.
Liquid delivery system cabinets handle TEOS, TEB, TMA, HCDS and similar precursors. Materials of construction are matched to the medium: PP cabinets with PFA piping for acids and alkalis, stainless-steel enclosures with SS316L piping for solvents.
Chemical Delivery Equipment
The wet-chemical chain from tank truck to process tool, specified at equipment level.
| Equipment | Function | Key specifications |
|---|---|---|
| Chemical Dispensing Module (CDM) | Bulk storage and dispense of wet chemical media | Acid/alkali: 2 × 200 L drums, 10–40 LPM. Solvent: 2 × 1000 L drums, 40–120 LPM. Bellows pump supply, dual pumps with standby, automatic drum switching |
| Chemical Mixing Unit (CMU) | Dilution to target concentration | 20–40 LPM, high-precision concentration meter, one mixing tank and one pump on standby, sampling before and after mixing |
| Clean Coupling Box (CCB) | Tank truck connection and supply tank filling | Nitrogen-pressure filling at 2 bar, 60–80 LPM, leak detection, negative pressure monitoring, automatic supply cut-off |
| Valve Manifold Box (VMB) | Distribution of CDM output to tool valve boxes | 2 to 8 process branches, independent branch control, leak alarm, pipeline water cleaning and purging |
| Tee Box / Future Box (TB/FTB) | Pipeline branching nodes | 3/4″ to 1-1/2″ main pipe distribution, built-in leak detector, expansion-ready |
| Pump Box / Sump Pit Box (PB/SPB) | Waste liquid collection and recovery | Three-point linkage level sensing, automatic discharge based on liquid level |
| Slurry Supply Cabinet (SDS) | CMP slurry supply | Magnetic levitation pumps, 0–20 LPM, 2 × 200 L HDPE tanks, particle count and pH monitoring, H2O2 dosing and titration options |
Exhaust Gas Abatement
Three scrubber technologies covering pyrophoric, corrosive, water-soluble and perfluorinated process exhausts.
| Scrubber type | Application | Specification |
|---|---|---|
| Electrically heated-wet | SiH4, NH3, SiH2Cl2, TEOS, PH3, Cl2, BCl3, HBr | 500 slm processing capacity, 600–800 °C high-temperature treatment, treatment efficiency above 99%, KF50 connection, auto-separable chamber for maintenance |
| Dry adsorption | Dry etch, diffusion, ion implantation, cleaning gas, BPSG, oxide deposition | 100 L + 10 L adsorption tanks, KF40 connection, safety bypass and interlock, low-cost adsorbent replacement, compact footprint |
| Plasma | PFC gases (NF3, CF4), flammable gases (SiH4, H2), water-soluble gases (Cl2, HF); IMP, etch, MOCVD, diffusion | 30 kW, 8 × KF50 inlets / KF100 outlet, internal circulation spray for water efficiency, long-service-life electrodes, corrosion-resistant construction |
Cleanroom Manufacturing Standards
Delivery equipment is manufactured in graded cleanrooms classified to ISO 14644-1, with the class matched to the contamination risk of each build stage.
ISO 14644-1 Class 5
Welding & Panel Assembly
Automatic orbital welding and panel sub-assembly of ultra-high-purity components.
ISO 14644-1 Class 6
Airtightness & Purity Testing
Helium leak-rate testing and purity verification.
ISO 14644-1 Class 7
Final Assembly
Frame integration, system final assembly and machine inspection.
Engineering, Hook-Up & Lifecycle Services
Coverage across the full asset lifecycle, delivered with a SEMI S2-compliant technology partner.
Design
Engineering Design
High-purity gas and chemical delivery system engineering design; customised product detailed design; SCADA supervisory control and data acquisition system design.
Build
Installation & Hook-Up
Full system hook-up engineering for greenfield and retrofit lines; life safety control systems (GMS/CMS); environmental engineering solutions; GC2-qualified pressure piping installation to ASME B31.3.
Operate
Lifecycle Management
Training for facility high-purity media systems; on-site total gas and chemical management (TGCM); custom processing for non-standard equipment; system upgrade, renovation and routine inspection.
SEMI S2 · ASME B31.3 Delivered with a SEMI S2-compliant technology partner holding GC2-qualified pressure piping to ASME B31.3, with a deployment record spanning 300 mm memory-fab gas delivery and 200 mm MEMS programmes.
Scoping fab media infrastructure?
Whether it is a greenfield line or a retrofit, send us your gas and chemical delivery scope — process tools, media, flow rates and cleanroom class — and we will come back with an engineering approach and hook-up plan.